First 292 Syrians went back to the Syrian town of Jarablus from Turkey on Wednesday, a Turkish official said.
It is the first official return of civilians after two weeks ago Ankara started military operation to sweep away jihadists and Syrian Kurdish militias from the frontier.
Jarablus is the first town, which was captured from ISIS by Turkish army and its Syrian rebel allies, the Free Syrian Army.
Turkey in its plan for a "safe zone"
in north Syria has already cleared militants from a 90-km (56-mile) stretch of Syrian territory and has pushed south.
As some civilians were able to return home, Turkey is still hosting 3 million Syrian refugees."The formal returns have begun today,"
said a spokesman at the governor's office for the southern Turkish province of Gaziantep, which lies across the border from Jarablus.
He said there were 292 people in the first group of registered returnees, including women, children and the elderly. More would be allowed to return but only gradually, he added.
Meanwhile Deputy Prime Minister Nurettin Canikli assured Turkey would supply mains power to Jarablus on Saturday, followed by water supplies two days later.